Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples

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Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples

Author: Westerhausen, Markus; Martin, Tanja; Metzger, Michael; Blendinger, Felix; Fleischer, Monika; Hofmann, Boris; Bucher, Volker
Tübinger Autor(en):
Westerhausen, Markus
Martin, Tanja
Blendinger, Felix
Fleischer, Monika
Published in: Microelectronic Engineering (2020), Bd. 227, Article 111315
Verlagsangabe: Elsevier
Language: English
Full text: http://dx.doi.org/10.1016/j.mee.2020.111315
ISSN: 1873-5568
DDC Classifikation: 530 - Physics
600 - Technology
Dokumentart: Article
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