Functional oxide thin films for micromechanical and bioelectronic devices

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Functional oxide thin films for micromechanical and bioelectronic devices

Author: Becker, Maximilian
Tübinger Autor(en):
Becker, Maximilian
Other Contributors: Eberhard Karls Universität Tübingen
Issue year: 2021
Verlagsangabe: Tübingen
Language: English
Full text: http://dx.doi.org/10.15496/publikation-64776
Dokumentart: PhDThesis
Pages: xi, 37 Seiten
Reference: 1787198987
Note: Erscheint auch als Online-Ausgabe
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