An anisotropic dry etch process with fluorine chemistry to create well-defined titanium surfaces for biomedical studies

Author:

Loeffler, R.; Fleischer, M.; Kern, D. P.

Tübinger Autor(en):

Published in:

Microelectronic Engineering (2012), Bd. 97, S. 361-364

Verlagsangabe:

Elsevier Science Bv

Language:

English

Full text:

ISSN:

0167-9317

DDC Classifikation:

530 - Physics
600 - Technology

Dokumentart:

Article

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