Author: | Loeffler, R.; Fleischer, M.; Kern, D. P. | |
Tübinger Autor(en): |
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Published in: |
Microelectronic Engineering
(2012), Bd.
97,
S.
361-364 |
|
Verlagsangabe: | Elsevier Science Bv | |
Language: | English | |
Full text: | http://dx.doi.org/10.1016/j.mee.2012.05.039 | |
ISSN: | 0167-9317 | |
DDC Classifikation: |
530 - Physics 600 - Technology |
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Dokumentart: | Article | |
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