An anisotropic dry etch process with fluorine chemistry to create well-defined titanium surfaces for biomedical studies

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An anisotropic dry etch process with fluorine chemistry to create well-defined titanium surfaces for biomedical studies

Author: Loeffler, R.; Fleischer, M.; Kern, D. P.
Tübinger Autor(en):
Kern, Dieter P.
Fleischer, Monika
Löffler, Ronny
Published in: Microelectronic Engineering (2012), Bd. 97, S. 361-364
Verlagsangabe: Elsevier Science Bv
Language: English
Full text: http://dx.doi.org/10.1016/j.mee.2012.05.039
ISSN: 0167-9317
DDC Classifikation: 530 - Physics
600 - Technology
Dokumentart: Article
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