Vacuum chamber for deposition of gradient thin films: Toward high-throughput structure-property correlative studies

dc.contributor.author	Lapkin, Dmitry
dc.contributor.author	Nasro, Roody
dc.contributor.author	Hagara, Jakub
dc.contributor.author	Hofferberth, Bernd
dc.contributor.author	Hinderhofer, Alexander
dc.contributor.author	Gerlach, Alexander
dc.contributor.author	Schreiber, Frank
dc.date.accessioned	2026-02-09T08:26:59Z
dc.date.available	2026-02-09T08:26:59Z
dc.date.issued	2025
dc.identifier.issn	0034-6748
dc.identifier.uri	http://hdl.handle.net/10900/175343
dc.language.iso	en	de_DE
dc.publisher	Melville : Aip Publishing	de_DE
dc.relation.uri	http://dx.doi.org/10.1063/5.0251290	de_DE
dc.subject.ddc	530	de_DE
dc.subject.ddc	600	de_DE
dc.title	Vacuum chamber for deposition of gradient thin films: Toward high-throughput structure-property correlative studies	de_DE
dc.type	Article	de_DE
utue.quellen.id	20250630000000_00653
utue.personen.roh	Lapkin, Dmitry
utue.personen.roh	Nasro, Roody
utue.personen.roh	Hagara, Jakub
utue.personen.roh	Hofferberth, Bernd
utue.personen.roh	Hinderhofer, Alexander
utue.personen.roh	Gerlach, Alexander
utue.personen.roh	Schreiber, Frank
dcterms.isPartOf.ZSTitelID	Review of Scientific Instruments	de_DE
dcterms.isPartOf.ZS-Issue	Article 053905	de_DE
dcterms.isPartOf.ZS-Volume	96 (5)	de_DE
utue.fakultaet	07 Mathematisch-Naturwissenschaftliche Fakultät	de_DE